Three-Dimensional Dielectrophoresis Device with Integrated Actuating and Impedance Sensing

................................................................................................................................................................3 INTRODUCTION .......................................................................................................................................................4 THEORY......................................................................................................................................................................5 DEP BACKGROUND ...................................................................................................................................................5 DEP CAGES AND ACTUATION ...................................................................................................................................9 IMPEDANCE SENSING...............................................................................................................................................10 SIMILAR DEP DEVICES........................................................................................................................................12 CMOS CHIP FOR INDIVIDUAL CELL MANIPULATION ................................................................................................12 A DIELECTROPHORETIC CHIP WITH A 3-D ELECTRIC FIELD GRADIENT ..................................................................13 MEMS ELECTROSTATIC PARTICLE TRANSPORTATION SYSTEM................................................................................14 FABRICATION METHODS ...................................................................................................................................14 RESULTS...................................................................................................................................................................16 PARASITIC CAGES....................................................................................................................................................16 CONCENTRATION INCREASES WITH MICROBEADS ...................................................................................................18 COMPARISON TO VOLTAGE SIMULATION RESULTS .................................................................................................18 RECOMMENDATIONS ..........................................................................................................................................20 REMOVAL OF PARASITIC CAGES..............................................................................................................................20 MANUFACTURING OF A MICRO SCALE DEVICE .......................................................................................................20 CREATE AN ARRAY OF DEVICES WITH A COMMON RESERVOIR .................................................................................24 CONCLUSIONS........................................................................................................................................................25 REFERENCES ..........................................................................................................................................................26 BIOGRAPHIES.........................................................................................................................................................27